1 um / 3612: Uniformity good Ave: 10366 Ang / Std dev: 18 Ang (Top: 10370A / Center: 10346 A / Flat: 10358A / Left: 10394A / Right: 10360A) *** 1.6 um / 3612: uniformity good Average: 17134 Ang / Std dev: 13 Ang (Top: 17139A / Center: 17146A / Flat: 17119A / Left: 17146A / Right: 17122A)