Problem svgcoat2 SNF 2008-10-20 00:55:59: Dummy wafer stuck at HPO
bilee at snf.stanford.edu
bilee at snf.stanford.edu
Mon Oct 20 00:56:00 PDT 2008
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Comment svgcoat2 SNF 2008-10-17 17:26:05: downstram not ready
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Problem svgcoat2 SNF 2008-10-20 00:55:59: Dummy wafer stuck at HPO
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RESET does not work. Cannot remove the wafer.
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Comment svgcoat2 SNF 2008-10-17 17:26:05: downstram not ready
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Problem svgcoat2 SNF 2008-10-20 00:55:59: Dummy wafer stuck at HPO
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