Problem svgcoat2 SNF 2008-10-20 00:55:59: Dummy wafer stuck at HPO

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Oct 20 07:41:40 PDT 2008


removed wafer from hotplate station
Cleaned chuck and hotplates  ( they were full of resist)
PLEASE MAKE SURE THE  DUMMY WAFER DOESNT
HAVE ANY RESIST ON THE BOTTOM , IF THEY DO
DONT USE THEM AND THROW THEM AWAY
WHEN THE SYSTEM SHOWS " UPSTREAM NOT READY"
ALL YOU GOT TO DO IS PRESS THE CLEAR BUTTON
THIS WILL NOT AFFECT  YOUR PROCESS
I hope  the infomation written here helps so we dont
see this problem  anymore.




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