Problem svgcoat2 SNF 2008-10-24 13:23:38: Very fine mist on all my wafers

rcordova at snf.stanford.edu rcordova at snf.stanford.edu
Fri Oct 24 13:23:38 PDT 2008


spun up 25 wafers with 3612 1um resist just before lunch, all of them have a fine mist on the surface (looks like poor exhaust) but the meter on the wall says it is ok)  Gary Sosa checing it out!
 




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