Problem svgcoat2 SNF 2008-10-25 14:55:22: Poor spin and very heavy mist, same as yesterda!
rcordova at snf.stanford.edu
rcordova at snf.stanford.edu
Sat Oct 25 14:55:23 PDT 2008
All the work that Gary did, does not seem to improve the
resist dispense for 3612 1 micron resist.
Very bad striations and tinydots from ehausted fumes landing back on the wafer. Cannot use!!
RCordova
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