Problem svgcoat2 SNF 2008-10-25 14:55:22: Poor spin and very heavy mist, same as yesterda!

rcordova at snf.stanford.edu rcordova at snf.stanford.edu
Sat Oct 25 14:55:23 PDT 2008


All the work that Gary did, does not seem to improve the 
resist dispense for 3612 1 micron resist.  
Very bad striations and tinydots from ehausted fumes landing back on the wafer.  Cannot use!!
RCordova




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