Problem svgcoat2 SNF 2008-10-25 14:55:22: Poor spin and very heavy mist, same as yesterda!

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Oct 27 09:15:24 PDT 2008


cleaned catch cup hmds hotplate and post bake plate
also Cleaned exhaust system , replaced resist bottle
and purged line, cycled wafers, ok to use. 




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