From gsosa at snf.stanford.edu Tue Sep 2 08:11:08 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 2 Sep 2008 08:11:08 -0700 Subject: Shutdown svgcoat2 SNF 2008-09-02 08:11:07: Software Upgrade Message-ID: Upgrading recipe manager software From gsosa at snf.stanford.edu Tue Sep 2 13:26:08 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 2 Sep 2008 13:26:08 -0700 Subject: Shutdown svgcoat2 SNF 2008-09-02 08:11:07: Software Upgrade Message-ID: New software upgrate created and debugged. The new upgrade has not been implemented yet. Old Software version still running. All track and recipe manager functions still the same. From jameson at snf.stanford.edu Mon Sep 8 13:20:49 2008 From: jameson at snf.stanford.edu (jameson at snf.stanford.edu) Date: Mon, 8 Sep 2008 13:20:49 -0700 Subject: Comment svgcoat2 SNF 2008-09-08 13:20:49: spin off center Message-ID: Did 5 wafers. Wafers 2 and 4 were good. Wafers 1, 3, and 5 spun off center, so the EBR removed way too much. From vilanova at snf.stanford.edu Mon Sep 8 14:56:34 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 8 Sep 2008 14:56:34 -0700 Subject: Comment svgcoat2 SNF 2008-09-08 13:20:49: spin off center Message-ID: cycled 10 wafers twice , EBR looks Good, uniformity ( prgr#7) was a little bit bad but I purged line cleaned duumies, ok to use. From lwchang at snf.stanford.edu Wed Sep 10 11:48:57 2008 From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu) Date: Wed, 10 Sep 2008 11:48:57 -0700 Subject: Problem svgcoat2 SNF 2008-09-10 11:48:55: run prog7 2mm EBR the last one of five wafers got 5mm EBR Message-ID: From mleone at snf.stanford.edu Fri Sep 12 16:15:02 2008 From: mleone at snf.stanford.edu (mleone at snf.stanford.edu) Date: Fri, 12 Sep 2008 16:15:02 -0700 Subject: Problem svgcoat2 SNF 2008-09-12 16:15:01: software locked Message-ID: I don't know how it happened but the software locked up and does not respond. I don't know if wafers can be run without the software. From vilanova at snf.stanford.edu Mon Sep 15 07:27:41 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 15 Sep 2008 07:27:41 -0700 Subject: Problem svgcoat2 SNF 2008-09-12 16:15:01: software locked Message-ID: the software was unlock when I cam ein this morning maybe someone else did something . From mahnaz at snf.stanford.edu Mon Sep 15 12:30:09 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 15 Sep 2008 12:30:09 -0700 Subject: Problem svgcoat2 SNF 2008-09-15 12:30:09: rough EBR Message-ID: 1 um 3612, 5 mm ebr very bad. From rcordova at snf.stanford.edu Tue Sep 16 15:00:34 2008 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Tue, 16 Sep 2008 15:00:34 -0700 Subject: Problem svgcoat2 SNF 2008-09-16 15:00:34: EBR on 2mm for PR7, EBR is more like 6 MM Message-ID: Very sporadic, wafer to wafer EBR is changing dramatically From jsuarez at snf.stanford.edu Thu Sep 18 10:07:05 2008 From: jsuarez at snf.stanford.edu (jsuarez at snf.stanford.edu) Date: Thu, 18 Sep 2008 10:07:05 -0700 Subject: Comment svgcoat2 SNF 2008-09-18 10:07:05: inconsistent EBR Message-ID: spun 8 wfs - EBR ranged from 1mm to 5mm From johana at snf.stanford.edu Sat Sep 20 18:10:23 2008 From: johana at snf.stanford.edu (johana at snf.stanford.edu) Date: Sat, 20 Sep 2008 18:10:23 -0700 Subject: Problem svgcoat2 SNF 2008-09-20 18:10:22: No 3716m Message-ID: The bottle of 3716m was used up. I replaced it with the only one found in the flammables cabinet but this one was also very low. It also had a later date on it. It would be great to get a new bottle inside the lab as this will be used every day. --Johan From gsosa at snf.stanford.edu Mon Sep 22 09:45:19 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 22 Sep 2008 09:45:19 -0700 Subject: Problem svgcoat2 SNF 2008-09-20 18:10:22: No 3716m Message-ID: Changed out the 3617m resist bottle. From rcordova at snf.stanford.edu Mon Sep 22 16:58:56 2008 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Mon, 22 Sep 2008 16:58:56 -0700 Subject: Shutdown svgcoat2 SNF 2008-09-22 16:58:55: spin speed motor not running. Message-ID: the last four out of eleven wafers were covered with "unspun" resist! system is down. Rosie From vilanova at snf.stanford.edu Tue Sep 23 14:55:20 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 23 Sep 2008 14:55:20 -0700 Subject: Comment svgcoat2 SNF 2008-09-23 14:55:20: Update ,SPindle motor Broken Message-ID: Update, !!the spindle motor is broken , I replaced the spindle, exhaust system and catch cup , also cleaned both hotplates I will continue working on the motor tomorrow morning . From vilanova at snf.stanford.edu Wed Sep 24 14:48:16 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 24 Sep 2008 14:48:16 -0700 Subject: Comment svgcoat2 SNF 2008-09-23 14:55:20: Update ,SPindle motor Broken Message-ID: replaced spindle motor, spindle, chuck . cleaned catch cup exhaust system , calibrated spindle and cycled wafers, ok to use. From vilanova at snf.stanford.edu Wed Sep 24 14:49:54 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 24 Sep 2008 14:49:54 -0700 Subject: Shutdown svgcoat2 SNF 2008-09-22 16:58:55: spin speed motor not running. Message-ID: replaced broken spindle motor , and chuck, cleaned catch cup replaced bad spindle , cleaned exhaust system , and hotplates cycled wafers , calibrated spindle, and cycled wafers, ready to use From vilanova at snf.stanford.edu Wed Sep 24 14:50:12 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 24 Sep 2008 14:50:12 -0700 Subject: Problem svgcoat2 SNF 2008-09-15 12:30:09: rough EBR Message-ID: replaced broken spindle motor , and chuck, cleaned catch cup replaced bad spindle , cleaned exhaust system , and hotplates cycled wafers , calibrated spindle, and cycled wafers, ready to use From druist at snf.stanford.edu Wed Sep 24 18:00:51 2008 From: druist at snf.stanford.edu (druist at snf.stanford.edu) Date: Wed, 24 Sep 2008 18:00:51 -0700 Subject: Problem svgcoat2 SNF 2008-09-24 18:00:51: HMDS prime not working Message-ID: wafer does not drop all the way to the HMDS prime hot plate & alarm goes off. tried track reset but still not working. Spinner works fine From renshen at snf.stanford.edu Wed Sep 24 22:23:20 2008 From: renshen at snf.stanford.edu (renshen at snf.stanford.edu) Date: Wed, 24 Sep 2008 22:23:20 -0700 Subject: Comment svgcoat2 SNF 2008-09-24 22:23:19: EBR nonconsistent Message-ID: Sometimes wider, sometimes narrower. From jparker at snf.stanford.edu Thu Sep 25 10:01:40 2008 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Thu, 25 Sep 2008 10:01:40 -0700 Subject: Problem svgcoat2 SNF 2008-09-25 10:01:39: Wobble while spinning Message-ID: Noticable wobble in wafers as they spin. From mahnaz at snf.stanford.edu Thu Sep 25 11:25:58 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 25 Sep 2008 11:25:58 -0700 Subject: Shutdown svgcoat2 SNF 2008-09-25 11:25:57: wobbling is never a good sign. Message-ID: From gsosa at snf.stanford.edu Thu Sep 25 16:18:48 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 25 Sep 2008 16:18:48 -0700 Subject: Shutdown svgcoat2 SNF 2008-09-25 11:25:57: wobbling is never a good sign. Message-ID: Checked and adjusted centering tab height. Wafers were traveling above the centering tabs causing non-centered and wobbly wafers. Checked wafer centering-OK Tested operation-all OK From gsosa at snf.stanford.edu Thu Sep 25 16:19:01 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 25 Sep 2008 16:19:01 -0700 Subject: Problem svgcoat2 SNF 2008-09-25 10:01:39: Wobble while spinning Message-ID: Checked and adjusted centering tab height. Wafers were traveling above the centering tabs causing non-centered and wobbly wafers. Checked wafer centering-OK Tested operation-all OK From gsosa at snf.stanford.edu Thu Sep 25 16:19:45 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 25 Sep 2008 16:19:45 -0700 Subject: Problem svgcoat2 SNF 2008-09-24 18:00:51: HMDS prime not working Message-ID: Checked and aligned wafer lifters to vrooves in hotplate. Tested with dummy program. all OK. From mferrier at snf.stanford.edu Thu Sep 25 17:39:02 2008 From: mferrier at snf.stanford.edu (mferrier at snf.stanford.edu) Date: Thu, 25 Sep 2008 17:39:02 -0700 Subject: Problem svgcoat2 SNF 2008-09-25 17:39:02: vaccum on hot plate Message-ID: my wafer was not realeased after the bake From mleone at snf.stanford.edu Thu Sep 25 17:56:47 2008 From: mleone at snf.stanford.edu (mleone at snf.stanford.edu) Date: Thu, 25 Sep 2008 17:56:47 -0700 Subject: Problem svgcoat2 SNF 2008-09-25 17:56:46: hotplate vacuume wont release Message-ID: had to run track reset From dasgupta at snf.stanford.edu Thu Sep 25 18:59:03 2008 From: dasgupta at snf.stanford.edu (dasgupta at snf.stanford.edu) Date: Thu, 25 Sep 2008 18:59:03 -0700 Subject: Problem svgcoat2 SNF 2008-09-25 18:59:03: Same vacuum problem Message-ID: Do not use hotplate for baking, use oven or other hot plate From gsosa at snf.stanford.edu Fri Sep 26 07:47:34 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 26 Sep 2008 07:47:34 -0700 Subject: Shutdown svgcoat2 SNF 2008-09-26 07:47:34: Working on EBR issues Message-ID: Working on inconsistent ebr issue From gsosa at snf.stanford.edu Fri Sep 26 15:51:48 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 26 Sep 2008 15:51:48 -0700 Subject: Shutdown svgcoat2 SNF 2008-09-26 07:47:34: Working on EBR issues Message-ID: Checked and replaced the linear bushings on the dispense arm top guide rail. Checked and centered dispense arm and checked 2 and 5 mm EBR width. All looks OK and linear travel of dispense arm is very smooth now. There were also vacuum issues with the hotplate oven. Cooled the plate down and cleaned vacuum channels and pnuematic hoses that were full of resist. Dis-assembled and cleaned the vacuum solinoid plunger and body, whick also was stuck with PR. Cycle tested 25 wafers through system with dry program. Tested 2 and 5 mm EBR with 8 wafers each. All looks OK. Please report problems if there are stilll issues with the EBR width. From gsosa at snf.stanford.edu Fri Sep 26 15:52:01 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 26 Sep 2008 15:52:01 -0700 Subject: Problem svgcoat2 SNF 2008-09-25 18:59:03: Same vacuum problem Message-ID: Checked and replaced the linear bushings on the dispense arm top guide rail. Checked and centered dispense arm and checked 2 and 5 mm EBR width. All looks OK and linear travel of dispense arm is very smooth now. There were also vacuum issues with the hotplate oven. Cooled the plate down and cleaned vacuum channels and pnuematic hoses that were full of resist. Dis-assembled and cleaned the vacuum solinoid plunger and body, whick also was stuck with PR. Cycle tested 25 wafers through system with dry program. Tested 2 and 5 mm EBR with 8 wafers each. All looks OK. Please report problems if there are stilll issues with the EBR width. From gsosa at snf.stanford.edu Fri Sep 26 15:52:07 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 26 Sep 2008 15:52:07 -0700 Subject: Problem svgcoat2 SNF 2008-09-25 17:56:46: hotplate vacuume wont release Message-ID: Checked and replaced the linear bushings on the dispense arm top guide rail. Checked and centered dispense arm and checked 2 and 5 mm EBR width. All looks OK and linear travel of dispense arm is very smooth now. There were also vacuum issues with the hotplate oven. Cooled the plate down and cleaned vacuum channels and pnuematic hoses that were full of resist. Dis-assembled and cleaned the vacuum solinoid plunger and body, whick also was stuck with PR. Cycle tested 25 wafers through system with dry program. Tested 2 and 5 mm EBR with 8 wafers each. All looks OK. Please report problems if there are stilll issues with the EBR width. From gsosa at snf.stanford.edu Fri Sep 26 15:52:14 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 26 Sep 2008 15:52:14 -0700 Subject: Problem svgcoat2 SNF 2008-09-25 17:39:02: vaccum on hot plate Message-ID: Checked and replaced the linear bushings on the dispense arm top guide rail. Checked and centered dispense arm and checked 2 and 5 mm EBR width. All looks OK and linear travel of dispense arm is very smooth now. There were also vacuum issues with the hotplate oven. Cooled the plate down and cleaned vacuum channels and pnuematic hoses that were full of resist. Dis-assembled and cleaned the vacuum solinoid plunger and body, whick also was stuck with PR. Cycle tested 25 wafers through system with dry program. Tested 2 and 5 mm EBR with 8 wafers each. All looks OK. Please report problems if there are stilll issues with the EBR width. From gsosa at snf.stanford.edu Fri Sep 26 15:52:25 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 26 Sep 2008 15:52:25 -0700 Subject: Comment svgcoat2 SNF 2008-09-24 22:23:19: EBR nonconsistent Message-ID: Checked and replaced the linear bushings on the dispense arm top guide rail. Checked and centered dispense arm and checked 2 and 5 mm EBR width. All looks OK and linear travel of dispense arm is very smooth now. There were also vacuum issues with the hotplate oven. Cooled the plate down and cleaned vacuum channels and pnuematic hoses that were full of resist. Dis-assembled and cleaned the vacuum solinoid plunger and body, whick also was stuck with PR. Cycle tested 25 wafers through system with dry program. Tested 2 and 5 mm EBR with 8 wafers each. All looks OK. Please report problems if there are stilll issues with the EBR width. From gsosa at snf.stanford.edu Fri Sep 26 15:52:32 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 26 Sep 2008 15:52:32 -0700 Subject: Comment svgcoat2 SNF 2008-09-18 10:07:05: inconsistent EBR Message-ID: Checked and replaced the linear bushings on the dispense arm top guide rail. Checked and centered dispense arm and checked 2 and 5 mm EBR width. All looks OK and linear travel of dispense arm is very smooth now. There were also vacuum issues with the hotplate oven. Cooled the plate down and cleaned vacuum channels and pnuematic hoses that were full of resist. Dis-assembled and cleaned the vacuum solinoid plunger and body, whick also was stuck with PR. Cycle tested 25 wafers through system with dry program. Tested 2 and 5 mm EBR with 8 wafers each. All looks OK. Please report problems if there are stilll issues with the EBR width. From gsosa at snf.stanford.edu Fri Sep 26 15:52:57 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 26 Sep 2008 15:52:57 -0700 Subject: Problem svgcoat2 SNF 2008-09-16 15:00:34: EBR on 2mm for PR7, EBR is more like 6 MM Message-ID: Checked and replaced the linear bushings on the dispense arm top guide rail. Checked and centered dispense arm and checked 2 and 5 mm EBR width. All looks OK and linear travel of dispense arm is very smooth now. There were also vacuum issues with the hotplate oven. Cooled the plate down and cleaned vacuum channels and pnuematic hoses that were full of resist. Dis-assembled and cleaned the vacuum solinoid plunger and body, whick also was stuck with PR. Cycle tested 25 wafers through system with dry program. Tested 2 and 5 mm EBR with 8 wafers each. All looks OK. Please report problems if there are stilll issues with the EBR width. From rcordova at snf.stanford.edu Sun Sep 28 10:34:48 2008 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Sun, 28 Sep 2008 10:34:48 -0700 Subject: Problem svgcoat2 SNF 2008-09-28 10:34:48: Spin motor not turning properly. Message-ID: Ran z dummy, and the spin speed is in slow motion. resist not spreading properly. Pr 7 2 mm ebr From vilanova at snf.stanford.edu Mon Sep 29 07:47:39 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 29 Sep 2008 07:47:39 -0700 Subject: Shutdown svgcoat2 SNF 2008-09-29 07:47:39: found chuck full of resist and motor stalled Message-ID: Found Chuck full of resist and motor stalled. From gsosa at snf.stanford.edu Mon Sep 29 10:58:49 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 29 Sep 2008 10:58:49 -0700 Subject: Shutdown svgcoat2 SNF 2008-09-29 07:47:39: found chuck full of resist and motor stalled Message-ID: Checked and replaced broken motor to spindle coupling. Recalibrated spindle-OK. Replaced catch cup. Tested all track functions. All looks good. From gsosa at snf.stanford.edu Mon Sep 29 10:59:45 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 29 Sep 2008 10:59:45 -0700 Subject: Problem svgcoat2 SNF 2008-09-28 10:34:48: Spin motor not turning properly. Message-ID: Checked and replaced broken motor to spindle coupling. Recalibrated spindle-OK. Replaced catch cup. Tested all track functions. All looks good. From jsuarez at snf.stanford.edu Tue Sep 30 09:39:16 2008 From: jsuarez at snf.stanford.edu (jsuarez at snf.stanford.edu) Date: Tue, 30 Sep 2008 09:39:16 -0700 Subject: Problem svgcoat2 SNF 2008-09-30 09:39:16: poor spin prog 7, 2 mm ebr Message-ID: