Shutdown svgcoat2 SNF 2008-09-22 16:58:55: spin speed motor not running.

rcordova at snf.stanford.edu rcordova at snf.stanford.edu
Mon Sep 22 16:58:56 PDT 2008


the last four out of eleven wafers were covered with "unspun" resist!   system is down.  
Rosie




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