Comment svgcoat2 SNF 2008-09-23 14:55:20: Update ,SPindle motor Broken

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Sep 24 14:48:16 PDT 2008


replaced spindle  motor, spindle, chuck . cleaned catch cup 
exhaust system , calibrated spindle and cycled wafers, ok to 
use. 




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