Problem svgcoat2 SNF 2008-09-15 12:30:09: rough EBR

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Sep 24 14:50:12 PDT 2008


replaced broken spindle motor , and chuck, cleaned catch cup
replaced bad spindle , cleaned exhaust system , and 
hotplates cycled wafers , calibrated spindle, and  cycled
wafers, ready to use




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