Problem svgcoat2 SNF 2008-09-24 18:00:51: HMDS prime not working

druist at snf.stanford.edu druist at snf.stanford.edu
Wed Sep 24 18:00:51 PDT 2008


wafer does not drop all the way to the HMDS prime hot plate & alarm goes off.  tried track reset but still not working.  Spinner works fine




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