Shutdown svgcoat2 SNF 2008-09-25 11:25:57: wobbling is never a good sign.

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Sep 25 16:18:48 PDT 2008


Checked and adjusted centering tab height. Wafers were traveling above the centering tabs causing non-centered and wobbly wafers. Checked wafer centering-OK Tested operation-all OK




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