Problem svgcoat2 SNF 2008-09-25 10:01:39: Wobble while spinning

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Sep 25 16:19:01 PDT 2008


Checked and adjusted centering tab height. Wafers were traveling above the centering tabs causing non-centered and wobbly wafers. Checked wafer centering-OK Tested operation-all OK




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