Problem svgcoat2 SNF 2008-09-25 17:39:02: vaccum on hot plate

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Sep 26 15:52:14 PDT 2008


Checked and replaced the linear bushings on the dispense arm top guide rail. Checked and centered dispense arm and checked 2 and 5 mm EBR width. All looks OK and linear travel of dispense arm is very smooth now. There were also vacuum issues with the hotplate oven. Cooled the plate down and cleaned vacuum channels and pnuematic hoses that were full of resist. Dis-assembled and cleaned the vacuum solinoid plunger and body, whick also was stuck with PR. Cycle tested 25 wafers through system with dry program. Tested 2 and 5 mm EBR with 8 wafers each. All looks OK. Please report problems if there are stilll issues with the EBR width. 




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