From mahnaz at snf.stanford.edu Wed Apr 1 11:14:24 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 1 Apr 2009 11:14:24 -0700 Subject: Problem svgcoat2 SNF 2009-04-01 11:14:24: 3 um Message-ID: Although after Mario worked on the system, I noticed slight improvments but still many speed boat . Sorry not good enough. From vilanova at snf.stanford.edu Thu Apr 2 15:16:54 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 2 Apr 2009 15:16:54 -0700 Subject: Problem svgcoat2 SNF 2009-04-01 11:14:24: 3 um Message-ID: Cleaned Up Catch cup, replaced Broken EBR Fitting, Found the chuck Out of center position ,Inspected Dispense hose ( It was ok ) Cleaned exhaust system, Hotplates and Belts, Cycled Wafers, Uniformity looks Good,. Ready to use. From mahnaz at snf.stanford.edu Thu Apr 2 15:29:11 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 2 Apr 2009 15:29:11 -0700 Subject: Comment svgcoat2 SNF 2009-04-02 15:29:11: 3 um up Message-ID: I checked the 3 um is perfect. very uniform and no spin boat, perfect EBR and No ebr back splash. The back of wafer very clean. Thickness check 302oo,30060,30050,30158,30207. Thanks Mario From gsosa at snf.stanford.edu Fri Apr 3 08:57:47 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 3 Apr 2009 08:57:47 -0700 Subject: Comment svgcoat2 SNF 2009-04-03 08:57:47: 955-7 0.7um thickness test 040309 Message-ID: Checked the 0.7 micron resist program for SPR 955-.7 photoresist. Target thickness = 0.7 microns. Mean thickness(5 points): 6921 Angstroms, Std Dev. 10 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean. From emyers at snf.stanford.edu Mon Apr 6 11:58:17 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 6 Apr 2009 11:58:17 -0700 Subject: Comment svgcoat2 SNF 2009-04-06 11:58:16: Hanging UP Message-ID: Ludwig was having trouble with the wafers stoping on the spinner. The system was confused, so I did a reboot. The first wafer also hung up on the spinner. I helped the rails open and everything went OK. From vilanova at snf.stanford.edu Tue Apr 7 09:03:43 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 7 Apr 2009 09:03:43 -0700 Subject: Comment svgcoat2 SNF 2009-04-06 11:58:16: Hanging UP Message-ID: CarBoy COntainer was almost Full ( I Replaced it ) when the carboy ( the big one Inside the cabinet ) is full or almost full the system stops or doesnt work properly) From kevhuang at snf.stanford.edu Sun Apr 12 16:40:27 2009 From: kevhuang at snf.stanford.edu (kevhuang at snf.stanford.edu) Date: Sun, 12 Apr 2009 16:40:27 -0700 Subject: Problem svgcoat2 SNF 2009-04-12 16:40:26: spr220-3 um resist problem Message-ID: streaks on wafers and one of them had a large chunk of resist / bubble on wafer From vilanova at snf.stanford.edu Mon Apr 13 07:54:16 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 13 Apr 2009 07:54:16 -0700 Subject: Problem svgcoat2 SNF 2009-04-12 16:40:26: spr220-3 um resist problem Message-ID: Found A big Chunck Of Dry Resist Around the dispense Hose,Cleaned Dispense HOse, Cycled wafers Uniformity Looks Good, Ok to use. From alsune at snf.stanford.edu Tue Apr 21 01:33:53 2009 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Tue, 21 Apr 2009 01:33:53 -0700 Subject: Problem svgcoat2 SNF 2009-04-21 01:33:52: Power supply Alarm Message-ID: Power supply Alarm went off during process From gsosa at snf.stanford.edu Tue Apr 21 14:41:25 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 21 Apr 2009 14:41:25 -0700 Subject: Problem svgcoat2 SNF 2009-04-21 01:33:52: Power supply Alarm Message-ID: Reset the pump controller and initialized the pump. Tested operation. All OK. From gsosa at snf.stanford.edu Wed Apr 22 09:35:30 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 22 Apr 2009 09:35:30 -0700 Subject: Comment svgcoat2 SNF 2009-04-22 09:35:30: 955-7 .7um thickness test 4/22/09 Message-ID: Checked the 0.7 micron resist program for SPR 955-.7 photoresist. Target thickness = 0.7 microns. Mean thickness(5 points): 6883 Angstroms, Std Dev. 11 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean. From filip at snf.stanford.edu Fri Apr 24 16:54:23 2009 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Fri, 24 Apr 2009 16:54:23 -0700 Subject: Problem svgcoat2 SNF 2009-04-24 16:54:22: broken wafer in coater sink Message-ID: the arms that are supposed to catch the wafer didn't catch it correctly, so the wafer was off-center, and broke during spin, before I could stop it. After resetting, the other wafers went OK. From filip at snf.stanford.edu Fri Apr 24 17:03:32 2009 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Fri, 24 Apr 2009 17:03:32 -0700 Subject: Problem svgcoat2 SNF 2009-04-24 17:03:32: AGAIN... Message-ID: watch your wafers. It happened again on my last wafer, but this time I powered off the track before it started spinning. The arms don't catch wafer (2 out of 15). I'm reluctant to shut down the equipment... From vilanova at snf.stanford.edu Mon Apr 27 08:44:14 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 27 Apr 2009 08:44:14 -0700 Subject: Problem svgcoat2 SNF 2009-04-24 16:54:22: broken wafer in coater sink Message-ID: removed broken wafers, cleaned catch cup , hotplates and belts, cleaned wafer carrire arms, and nozzles, dispense Hoses, Cycled Wafers, Ok to use. From vilanova at snf.stanford.edu Mon Apr 27 08:44:21 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 27 Apr 2009 08:44:21 -0700 Subject: Problem svgcoat2 SNF 2009-04-24 17:03:32: AGAIN... Message-ID: removed broken wafers, cleaned catch cup , hotplates and belts, cleaned wafer carrire arms, and nozzles, dispense Hoses, Cycled Wafers, Ok to use. From narii at snf.stanford.edu Mon Apr 27 16:56:57 2009 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Mon, 27 Apr 2009 16:56:57 -0700 Subject: Problem svgcoat2 SNF 2009-04-27 16:56:57: Wafer transport problem Message-ID: Wafer does not pass through prime vapor oven to coater. From vilanova at snf.stanford.edu Tue Apr 28 07:56:44 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 28 Apr 2009 07:56:44 -0700 Subject: Problem svgcoat2 SNF 2009-04-27 16:56:57: Wafer transport problem Message-ID: System Working Fine, I Cycled and cleaned All of our Dummy wafers ( 12 Each ) and I couldnt repetat the User Problem, ok to use. From ginel at snf.stanford.edu Wed Apr 29 10:30:30 2009 From: ginel at snf.stanford.edu (ginel at snf.stanford.edu) Date: Wed, 29 Apr 2009 10:30:30 -0700 Subject: Problem svgcoat2 SNF 2009-04-29 10:30:30: woln't run wafers Message-ID: can't figure out why its alarming From gsosa at snf.stanford.edu Wed Apr 29 11:36:54 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 29 Apr 2009 11:36:54 -0700 Subject: Problem svgcoat2 SNF 2009-04-29 10:30:30: woln't run wafers Message-ID: Purged resist line # for 3612 resist. Reset the track hardware. Tested track- All ok From lwchang at snf.stanford.edu Wed Apr 29 13:15:23 2009 From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu) Date: Wed, 29 Apr 2009 13:15:23 -0700 Subject: Problem svgcoat2 SNF 2009-04-29 13:15:22: track does not start Message-ID: From gsosa at snf.stanford.edu Wed Apr 29 14:03:49 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 29 Apr 2009 14:03:49 -0700 Subject: Problem svgcoat2 SNF 2009-04-29 13:15:22: track does not start Message-ID: Cleaned the Vapor prime hotplate. Reset system. Tested track. From ginel at snf.stanford.edu Thu Apr 30 15:00:34 2009 From: ginel at snf.stanford.edu (ginel at snf.stanford.edu) Date: Thu, 30 Apr 2009 15:00:34 -0700 Subject: Problem svgcoat2 SNF 2009-04-30 15:00:34: many errors Message-ID: i had many errors yesterday on svgcoat2 that required taking all the wafers off the track and resetting... seemed to be related totthe machine losingt rack of wafers around the spinner. Once time my wafer stuck to the spinner offcenter and made a horrible sound while spinning. From king at snf.stanford.edu Thu Apr 30 22:46:58 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 30 Apr 2009 22:46:58 -0700 Subject: Problem svgcoat2 SNF 2009-04-30 22:46:58: wafers stuck under vacuum to the chuck Message-ID: To remove it, hold your wafer and then turn off the power to that station. If you don't hold it it can drop and smash. i was able to use track2 in manual mode to get through the sequence.