Problem svgcoat2 SNF 2009-04-01 11:14:24: 3 um

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Apr 2 15:16:54 PDT 2009


Cleaned Up Catch cup, replaced Broken EBR Fitting, Found
the chuck Out of center position ,Inspected  Dispense hose ( It was ok ) 
Cleaned exhaust system, Hotplates and Belts, Cycled Wafers,
Uniformity looks Good,. Ready to use. 




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