Comment svgcoat2 SNF 2009-04-02 15:29:11: 3 um up

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Thu Apr 2 15:29:11 PDT 2009


I checked the 3 um is perfect.
very uniform and no spin boat, perfect EBR and  No ebr back splash.
The back of wafer very clean.
Thickness check 302oo,30060,30050,30158,30207.
Thanks Mario




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