Comment svgcoat2 SNF 2009-04-03 08:57:47: 955-7 0.7um thickness test 040309

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Apr 3 08:57:47 PDT 2009


Checked the 0.7 micron resist program for SPR 955-.7 photoresist.  Target thickness = 0.7 microns. Mean thickness(5 points): 6921  Angstroms, Std Dev. 10 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean.




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