Problem svgcoat2 SNF 2009-04-12 16:40:26: spr220-3 um resist problem

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Apr 13 07:54:16 PDT 2009


Found A big Chunck Of Dry Resist Around  the
dispense Hose,Cleaned Dispense HOse, Cycled wafers
Uniformity Looks Good, Ok to use. 




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