Problem svgcoat2 SNF 2009-04-24 16:54:22: broken wafer in coater sink

filip at snf.stanford.edu filip at snf.stanford.edu
Fri Apr 24 16:54:23 PDT 2009


the arms that are supposed to catch the wafer didn't catch it correctly, so the wafer was off-center, and broke during spin, before I could stop it. After resetting, the other wafers went OK. 




More information about the svgcoat2-pcs mailing list