Problem svgcoat2 SNF 2009-04-24 17:03:32: AGAIN...

filip at snf.stanford.edu filip at snf.stanford.edu
Fri Apr 24 17:03:32 PDT 2009


watch your wafers. It happened again on my last wafer, but this time I powered off the track before it started spinning. The arms don't catch wafer (2 out of 15). I'm reluctant to shut down the equipment...




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