Problem svgcoat2 SNF 2009-04-30 15:00:34: many errors

ginel at snf.stanford.edu ginel at snf.stanford.edu
Thu Apr 30 15:00:34 PDT 2009


i had many errors yesterday on svgcoat2 that required taking all the wafers off the track and resetting... seemed to be related totthe machine losingt rack of wafers around the spinner.  Once time my wafer stuck to the spinner offcenter and made a horrible sound while spinning.




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