Problem svgcoat2 SNF 2009-04-30 22:46:58: wafers stuck under vacuum to the chuck

king at king at
Thu Apr 30 22:46:58 PDT 2009

To remove it, hold your wafer and then turn off the power to that station. If you don't hold it it can drop and smash.  i was able to use track2 in manual mode to get through the sequence. 

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