From zeost at snf.stanford.edu Sun Aug 2 01:59:27 2009 From: zeost at snf.stanford.edu (zeost at snf.stanford.edu) Date: Sun, 2 Aug 2009 01:59:27 -0700 Subject: Problem svgcoat2 SNF 2009-08-02 01:59:26: Sender station not working Message-ID: The sender station is not going down so I had to manually transfer the wafers. From vilanova at snf.stanford.edu Mon Aug 3 07:49:10 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 3 Aug 2009 07:49:10 -0700 Subject: Problem svgcoat2 SNF 2009-08-02 01:59:26: Sender station not working Message-ID: the carboy was Full, All they had to do was Empty it and thats it Cycled wafers Ok to use. From alsune at snf.stanford.edu Wed Aug 5 23:03:43 2009 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Wed, 5 Aug 2009 23:03:43 -0700 Subject: Problem svgcoat2 SNF 2009-08-05 23:03:42: VP track not responding Message-ID: VP track not responding. Tried to reset the tracks but still doesn't work. From yiwu at snf.stanford.edu Thu Aug 6 00:50:18 2009 From: yiwu at snf.stanford.edu (yiwu at snf.stanford.edu) Date: Thu, 6 Aug 2009 00:50:18 -0700 Subject: Problem svgcoat2 SNF 2009-08-06 00:50:17: wafer broken during coating Message-ID: I ran 3 dummy wafers using program 7: 1.0um w/ VP 2mmEBR and it turned out be fine...but when I ran my real sample, the wafer was broken during the coating process and the alarm reports Track Vacuum Break. However, my rest samples were OK without problem...There are still silicon wafer residues in the coating chamber. From vilanova at snf.stanford.edu Thu Aug 6 08:43:48 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 6 Aug 2009 08:43:48 -0700 Subject: Problem svgcoat2 SNF 2009-08-05 23:03:42: VP track not responding Message-ID: Firstable : the System DOes not work or shutsdown If the Waste Recovery carboy is full, If you press On the Top RIght hand size Button that says " Track 2 ) and HOld it for a minute or 2 this will Empty the small waste Container and will send The Waste Liquid Over to the Big Carboy , then the system will be ready to Use ( this is shown on the training Class) ALso People are running Coated sided Wafers without baking it first, this leaves the chuck full of resist and the hotplate aswell when this happens the wafer On the chuck gets stuck and breaks! If youre not sure of the procedure you can always ask us. CLEANED BROKEN WAFERS , CLEANED CHUCK CATCH CUP, BELTS HOTPLATES AND TRANSFERS ARM SYSTEM . CYCLED WAFERS, READy to use. From vilanova at snf.stanford.edu Thu Aug 6 08:43:55 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 6 Aug 2009 08:43:55 -0700 Subject: Problem svgcoat2 SNF 2009-08-06 00:50:17: wafer broken during coating Message-ID: Firstable : the System DOes not work or shutsdown If the Waste Recovery carboy is full, If you press On the Top RIght hand size Button that says " Track 2 ) and HOld it for a minute or 2 this will Empty the small waste Container and will send The Waste Liquid Over to the Big Carboy , then the system will be ready to Use ( this is shown on the training Class) ALso People are running Coated sided Wafers without baking it first, this leaves the chuck full of resist and the hotplate aswell when this happens the wafer On the chuck gets stuck and breaks! If youre not sure of the procedure you can always ask us. CLEANED BROKEN WAFERS , CLEANED CHUCK CATCH CUP, BELTS HOTPLATES AND TRANSFERS ARM SYSTEM . CYCLED WAFERS, READy to use. From sbasumal at snf.stanford.edu Mon Aug 10 16:40:36 2009 From: sbasumal at snf.stanford.edu (sbasumal at snf.stanford.edu) Date: Mon, 10 Aug 2009 16:40:36 -0700 Subject: Problem svgcoat2 SNF 2009-08-10 16:40:36: out of 3612 Message-ID: From vilanova at snf.stanford.edu Tue Aug 11 08:06:27 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 11 Aug 2009 08:06:27 -0700 Subject: Problem svgcoat2 SNF 2009-08-10 16:40:36: out of 3612 Message-ID: Replaced Empty Resist Bottle, Cycled wafers, ok to use REPLACING THE RESIST BOTTLE IS NOT A DIFFICULT THING TO DO AND IS ALSO IN ULI'S TRAINING SESSION, THIS COULD HAVE BEEN TAKING CARE OF THE USER. From xzhuan1 at snf.stanford.edu Thu Aug 13 20:31:06 2009 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Thu, 13 Aug 2009 20:31:06 -0700 Subject: Problem svgcoat2 SNF 2009-08-13 20:31:05: 3um pr dispensing didn't cover wafer center Message-ID: From gsosa at snf.stanford.edu Fri Aug 14 08:40:07 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 14 Aug 2009 08:40:07 -0700 Subject: Problem svgcoat2 SNF 2009-08-13 20:31:05: 3um pr dispensing didn't cover wafer center Message-ID: Checked resist bottle-OK. Checked dispense line- OK( no bubbles). Tested track with standard 3.0 micron recipe- All looks OK. From chienyuc at snf.stanford.edu Sat Aug 15 20:16:34 2009 From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu) Date: Sat, 15 Aug 2009 20:16:34 -0700 Subject: Comment svgcoat2 SNF 2009-08-15 20:16:33: please return dummies after use Message-ID: coater dummy wafers low From tura at snf.stanford.edu Sun Aug 16 15:12:48 2009 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Sun, 16 Aug 2009 15:12:48 -0700 Subject: Problem svgcoat2 SNF 2009-08-16 15:12:47: 4um resist very nonuniform Message-ID: From vilanova at snf.stanford.edu Mon Aug 17 07:40:32 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 17 Aug 2009 07:40:32 -0700 Subject: Comment svgcoat2 SNF 2009-08-15 20:16:33: please return dummies after use Message-ID: Peoploe Leave Dummy wafers all over the Yellow Room Specially by the ASML Table , Please return the Dummy wafers back to their box Once youve finish Use Them. From vilanova at snf.stanford.edu Mon Aug 17 07:51:24 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 17 Aug 2009 07:51:24 -0700 Subject: Problem svgcoat2 SNF 2009-08-16 15:12:47: 4um resist very nonuniform Message-ID: cleaned dispense HOse Cycled wafers , Uniformity is Excellent, Ok to use. From yiwu at snf.stanford.edu Tue Aug 18 01:43:23 2009 From: yiwu at snf.stanford.edu (yiwu at snf.stanford.edu) Date: Tue, 18 Aug 2009 01:43:23 -0700 Subject: Problem svgcoat2 SNF 2009-08-18 01:43:22: wafer cracks after Prime Message-ID: I am running program 7. The first wafers went well but the third one after the HMDS, the wafer cracked into two pieces on cooling stage. I have to stop the trasfer stage and took my wafer out. From vilanova at snf.stanford.edu Tue Aug 18 07:50:35 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 18 Aug 2009 07:50:35 -0700 Subject: Problem svgcoat2 SNF 2009-08-18 01:43:22: wafer cracks after Prime Message-ID: cleaned primve hotplate and cycled wafers, Couldnt repeat the problem , Ok to use. From gsosa at snf.stanford.edu Tue Aug 18 09:58:07 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 18 Aug 2009 09:58:07 -0700 Subject: Comment svgcoat2 SNF 2009-08-18 09:58:06: 955 0.7um thickness test 8/18 Message-ID: Checked the 0.7 micron resist program for SPR 955-.7 photoresist. Target thickness = 0.7 microns. Mean thickness(5 points): 6852 Angstroms, Std Dev. 6 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean. From srikantv at snf.stanford.edu Fri Aug 21 13:07:09 2009 From: srikantv at snf.stanford.edu (srikantv at snf.stanford.edu) Date: Fri, 21 Aug 2009 13:07:09 -0700 Subject: Comment svgcoat2 SNF 2009-08-21 13:07:09: track above spinner did not open every time Message-ID: On 3 of my wafers the track above the resist spinner did not open fully. Reset and process continued normally. From king at snf.stanford.edu Fri Aug 28 21:58:07 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 28 Aug 2009 21:58:07 -0700 Subject: Comment svgcoat2 SNF 2009-08-28 21:58:07: Dopants at SVGCoat? Message-ID: I was told that staff gave the OK for dopant-containing films to be spun on the SVG coaters. If true could you please elaborate on this? Who what when how why. Thanks. From mtang at snf.stanford.edu Mon Aug 31 09:22:25 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 31 Aug 2009 09:22:25 -0700 Subject: Comment svgcoat2 SNF 2009-08-28 21:58:07: Dopants at SVGCoat? Message-ID: These have not been approved by SpecMat. If anyone has info on this, please let us know!