From jprovine at snf.stanford.edu Wed Dec 2 05:57:02 2009 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 2 Dec 2009 05:57:02 -0800 Subject: Problem svgcoat2 SNF 2009-12-02 05:57:01: hot plate has burned on PR Message-ID: wafer with backside photoresist went onto the hotplate and now hotplate needs to be cleaned of PR. DO NOT USE HOTPLATE From vilanova at snf.stanford.edu Wed Dec 2 07:37:18 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 2 Dec 2009 07:37:18 -0800 Subject: Problem svgcoat2 SNF 2009-12-02 05:57:01: hot plate has burned on PR Message-ID: cleaned resist residues , tested ok to use. From mrlin at snf.stanford.edu Thu Dec 3 19:13:51 2009 From: mrlin at snf.stanford.edu (mrlin at snf.stanford.edu) Date: Thu, 3 Dec 2009 19:13:51 -0800 Subject: Problem svgcoat2 SNF 2009-12-03 19:13:51: 955 splotchy Message-ID: ran 4 dummies, then the real one. last dummy looks great, but real wafer looks horrible. tried again, and still looks horrible From vilanova at snf.stanford.edu Fri Dec 4 08:02:10 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 4 Dec 2009 08:02:10 -0800 Subject: Problem svgcoat2 SNF 2009-12-03 19:13:51: 955 splotchy Message-ID: Purged Line and ran several Dummy wafers, Uniformity Looks Good , Cleaned and Cycled wafers again and Uniformity Looks Fine Ok to use. From jimkruger at snf.stanford.edu Tue Dec 8 20:16:06 2009 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Tue, 8 Dec 2009 20:16:06 -0800 Subject: Problem svgcoat2 SNF 2009-12-08 20:16:06: EBR arm stuck, no EBR results Message-ID: From vilanova at snf.stanford.edu Wed Dec 9 08:18:57 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 9 Dec 2009 08:18:57 -0800 Subject: Problem svgcoat2 SNF 2009-12-08 20:16:06: EBR arm stuck, no EBR results Message-ID: EBR working Fine , Cycled 6 wafers with 2 mm EBR and also 5mm EBR) There Is a 15 Seconds Gap Between Before The EBR Kicks In Thats when the Arm Goes On top Of the wafer (edge) and then Comes down to dispense EBR, Ok to use. From sdogbe at snf.stanford.edu Wed Dec 9 17:45:42 2009 From: sdogbe at snf.stanford.edu (sdogbe at snf.stanford.edu) Date: Wed, 9 Dec 2009 17:45:42 -0800 Subject: Problem svgcoat2 SNF 2009-12-09 17:45:42: spr 955 resist alarm Message-ID: I was using 3612 when the alarm came. From mmessana at snf.stanford.edu Wed Dec 9 20:45:56 2009 From: mmessana at snf.stanford.edu (mmessana at snf.stanford.edu) Date: Wed, 9 Dec 2009 20:45:56 -0800 Subject: Comment svgcoat2 SNF 2009-12-09 20:45:55: 955 OK, but low Message-ID: Ran 5 wafers at 1um thickness without alarming. Bottle is low and there are no extras. From vilanova at snf.stanford.edu Thu Dec 10 07:51:47 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 10 Dec 2009 07:51:47 -0800 Subject: Problem svgcoat2 SNF 2009-12-09 17:45:42: spr 955 resist alarm Message-ID: Got A gallon From the Chemical Room ( there no more 955 left!!!) Replaced Empty Bottle , Purged Line , cycled wafers, Ok to use. From vilanova at snf.stanford.edu Thu Dec 10 07:52:02 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 10 Dec 2009 07:52:02 -0800 Subject: Comment svgcoat2 SNF 2009-12-09 20:45:55: 955 OK, but low Message-ID: Got A gallon From the Chemical Room ( there no more 955 left!!!) Replaced Empty Bottle , Purged Line , cycled wafers ok to use. From gsosa at snf.stanford.edu Mon Dec 14 09:39:12 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 14 Dec 2009 09:39:12 -0800 Subject: Comment svgcoat2 SNF 2009-12-14 09:39:12: SPR-955-7 Thickness Message-ID: Checked the 0.7 micron resist program for SPR 955-.7 photoresist. Target thickness = 0.7 microns. Mean thickness(9 points): 6886 Angstroms, Std Dev. 6 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean. From rshyam at snf.stanford.edu Mon Dec 14 18:00:41 2009 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Mon, 14 Dec 2009 18:00:41 -0800 Subject: Problem svgcoat2 SNF 2009-12-14 18:00:40: wafer transfer problems Message-ID: From vilanova at snf.stanford.edu Tue Dec 15 14:48:17 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 15 Dec 2009 14:48:17 -0800 Subject: Problem svgcoat2 SNF 2009-12-14 18:00:40: wafer transfer problems Message-ID: there was no problem with track transfer but with the metal cassette , Adjusted MEtal cassette , Ok to use. From mahnaz at snf.stanford.edu Tue Dec 15 15:39:55 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 15 Dec 2009 15:39:55 -0800 Subject: Problem svgcoat2 SNF 2009-12-15 15:39:54: wafer prime Message-ID: not functioning. From gsosa at snf.stanford.edu Tue Dec 15 16:40:11 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 15 Dec 2009 16:40:11 -0800 Subject: Problem svgcoat2 SNF 2009-12-15 15:39:54: wafer prime Message-ID: Adjusted wire lifters and calibrated lifter position. Tested operation. All OK.