Problem svgcoat2 SNF 2009-12-02 05:57:01: hot plate has burned on PR

jprovine at snf.stanford.edu jprovine at snf.stanford.edu
Wed Dec 2 05:57:02 PST 2009

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wafer with backside photoresist went onto the hotplate and now hotplate needs to be cleaned of PR.  DO NOT USE HOTPLATE

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