Problem svgcoat2 SNF 2009-12-03 19:13:51: 955 splotchy

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri Dec 4 08:02:10 PST 2009


Purged Line and ran several Dummy wafers, Uniformity Looks Good
, Cleaned and  Cycled wafers again and Uniformity Looks Fine
Ok to use. 




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