Problem svgcoat2 SNF 2009-12-08 20:16:06: EBR arm stuck, no EBR results

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Dec 9 08:18:57 PST 2009


EBR working Fine , Cycled 6 wafers  with 2 mm EBR and also 
5mm EBR)  There Is a 15 Seconds Gap Between Before 
The EBR Kicks In Thats when the Arm Goes On top Of the wafer (edge)
and then Comes down to dispense EBR, Ok to use. 




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