Comment svgcoat2 SNF 2009-12-14 09:39:12: SPR-955-7 Thickness

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Dec 14 09:39:12 PST 2009


Checked the 0.7 micron resist program for SPR 955-.7 photoresist.  Target thickness = 0.7 microns. Mean thickness(9 points): 6886  Angstroms, Std Dev. 6 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean.




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