From king at snf.stanford.edu Mon Feb 2 19:32:01 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Mon, 2 Feb 2009 19:32:01 -0800 Subject: Problem svgcoat2 SNF 2009-02-02 19:32:00: Mouse is bad Message-ID: The mouse on the terminal next to the SVG coater is going bad. From vilanova at snf.stanford.edu Tue Feb 3 07:27:55 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 3 Feb 2009 07:27:55 -0800 Subject: Problem svgcoat2 SNF 2009-02-02 19:32:00: Mouse is bad Message-ID: the mouse to the Sunray terminal across from SVGcoat has been replaced. From sbasumal at snf.stanford.edu Tue Feb 3 17:19:19 2009 From: sbasumal at snf.stanford.edu (sbasumal at snf.stanford.edu) Date: Tue, 3 Feb 2009 17:19:19 -0800 Subject: Problem svgcoat2 SNF 2009-02-03 17:19:19: dummy wafer stuck on hotplate... Message-ID: ..was using one of the SNF dummies. May have had resist on the backside. Tried to pry off but wafer broke. From gsosa at snf.stanford.edu Wed Feb 4 08:02:42 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 4 Feb 2009 08:02:42 -0800 Subject: Problem svgcoat2 SNF 2009-02-03 17:19:19: dummy wafer stuck on hotplate... Message-ID: Removed dummy wafer and cleaned resist residue off of hotplate. Tested track operation. All OK. From vilanova at snf.stanford.edu Wed Feb 4 08:41:14 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 4 Feb 2009 08:41:14 -0800 Subject: Comment svgcoat2 SNF 2009-02-04 08:41:13: cleaned catch cup belts, chuck , hotplate. Message-ID: From wessmith at snf.stanford.edu Thu Feb 5 18:24:14 2009 From: wessmith at snf.stanford.edu (wessmith at snf.stanford.edu) Date: Thu, 5 Feb 2009 18:24:14 -0800 Subject: Problem svgcoat2 SNF 2009-02-05 18:24:13: spinner makes more noise than normal Message-ID: When spin speeds are greater than 5000rpm, the spinner is much louder than normal. The spin speeds seem to hold steady though. From vilanova at snf.stanford.edu Fri Feb 6 10:46:39 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 6 Feb 2009 10:46:39 -0800 Subject: Problem svgcoat2 SNF 2009-02-05 18:24:13: spinner makes more noise than normal Message-ID: Calibrated spindle MOtor, motor whitin specs Maybe The reason why the motor was making that noise was because the wafer was off center or the wafer was to heavier than normal, ok to use. From lwchang at snf.stanford.edu Sat Feb 7 16:46:36 2009 From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu) Date: Sat, 7 Feb 2009 16:46:36 -0800 Subject: Problem svgcoat2 SNF 2009-02-07 16:46:35: unable to detect wafers at the sender station Message-ID: From gsosa at snf.stanford.edu Mon Feb 9 08:31:49 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 9 Feb 2009 08:31:49 -0800 Subject: Problem svgcoat2 SNF 2009-02-07 16:46:35: unable to detect wafers at the sender station Message-ID: Tested track operation-OK. Checked utility panel for interlocks-OK. System ran OK with no problems. Cleaned coater bowl. From gsosa at snf.stanford.edu Fri Feb 13 16:33:35 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 13 Feb 2009 16:33:35 -0800 Subject: Comment svgcoat2 SNF 2009-02-13 16:33:34: 955-7 resist thickness 0.7, 2/13/09 Message-ID: Checked the 0.7 micron resist program for SPR 955-.7 photoresist. Target thickness = 0.7 microns. Mean thickness(5 points): 6913 Angstroms, Std Dev. 16 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean. From cmcg at snf.stanford.edu Fri Feb 13 19:34:42 2009 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Fri, 13 Feb 2009 19:34:42 -0800 Subject: Problem svgcoat2 SNF 2009-02-13 19:34:42: 955 resist low, no more in cabinet Message-ID: From vilanova at snf.stanford.edu Sat Feb 14 11:01:38 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sat, 14 Feb 2009 11:01:38 -0800 Subject: Problem svgcoat2 SNF 2009-02-13 19:34:42: 955 resist low, no more in cabinet Message-ID: Came in and got the resist from the back room , put in on the Service Area and I asked MAry C. to change the bottle for me, ( thanks MAry Calarrudo! ) From ajamo at snf.stanford.edu Sun Feb 15 14:24:49 2009 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Sun, 15 Feb 2009 14:24:49 -0800 Subject: Problem svgcoat2 SNF 2009-02-15 14:24:48: Changed SPR 220-3 Message-ID: Mary and I changed (well, Mary changed and I watched) the resist bottle (SPR220-3), ran a few dummies but there may still be some air bubbles in the line, so run lots of dummies and beware....... From vilanova at snf.stanford.edu Tue Feb 17 07:53:13 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 17 Feb 2009 07:53:13 -0800 Subject: Problem svgcoat2 SNF 2009-02-15 14:24:48: Changed SPR 220-3 Message-ID: Purged line cycled wafers, Uniformity Looks Good, ok to use. From grahamab at snf.stanford.edu Sat Feb 21 17:38:23 2009 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Sat, 21 Feb 2009 17:38:23 -0800 Subject: Comment svgcoat2 SNF 2009-02-21 17:38:23: cool plate #1 not advancing wafer Message-ID: running 1um w/o VP 2mm EBR and wafer keeps stopping on cool plate #1 without advancing. goes fine once nudged, but doing it on every wafer. From rshyam at snf.stanford.edu Sun Feb 22 05:48:21 2009 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Sun, 22 Feb 2009 05:48:21 -0800 Subject: Comment svgcoat2 SNF 2009-02-22 05:48:20: Cool plate #1 not advancing due to manual mode Message-ID: Found it in manual mode. Worked as usual on changing to auto mode. From vilanova at snf.stanford.edu Mon Feb 23 07:16:04 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 23 Feb 2009 07:16:04 -0800 Subject: Comment svgcoat2 SNF 2009-02-21 17:38:23: cool plate #1 not advancing wafer Message-ID: User HAd the system Undermanual mode thats why the Wafers Coulndt Advance to the chuck. From vilanova at snf.stanford.edu Mon Feb 23 07:16:13 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 23 Feb 2009 07:16:13 -0800 Subject: Comment svgcoat2 SNF 2009-02-22 05:48:20: Cool plate #1 not advancing due to manual mode Message-ID: Cleared.