Problem svgcoat2 SNF 2009-02-03 17:19:19: dummy wafer stuck on hotplate...

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Feb 4 08:02:42 PST 2009

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Removed dummy wafer and cleaned resist residue off of hotplate. Tested track operation. All OK.

Previous message: Problem svgcoat2 SNF 2009-02-03 17:19:19: dummy wafer stuck on hotplate...
Next message: Comment svgcoat2 SNF 2009-02-04 08:41:13: cleaned catch cup belts, chuck , hotplate.
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