Problem svgcoat2 SNF 2009-02-07 16:46:35: unable to detect wafers at the sender station

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Feb 9 08:31:49 PST 2009


Tested track operation-OK. Checked utility panel for interlocks-OK. System ran OK with no problems. Cleaned coater bowl.




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