Comment svgcoat2 SNF 2009-02-13 16:33:34: 955-7 resist thickness 0.7, 2/13/09

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Feb 13 16:33:35 PST 2009


Checked the 0.7 micron resist program for SPR 955-.7 photoresist.  Target thickness = 0.7 microns. Mean thickness(5 points): 6913  Angstroms, Std Dev. 16 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean.




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