Comment svgcoat2 SNF 2009-02-21 17:38:23: cool plate #1 not advancing wafer

grahamab at snf.stanford.edu grahamab at snf.stanford.edu
Sat Feb 21 17:38:23 PST 2009


running 1um w/o VP 2mm EBR and wafer keeps stopping on cool plate #1 without advancing.  goes fine once nudged, but doing it on every wafer.




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