Comment svgcoat2 SNF 2009-02-21 17:38:23: cool plate #1 not advancing wafer

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Feb 23 07:16:04 PST 2009


User HAd the system Undermanual mode thats why the
Wafers Coulndt Advance to the chuck. 




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