Comment svgcoat2 SNF 2009-01-05 16:17:00: Thickness Tests 01/05/09

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Jan 5 16:17:00 PST 2009


Resist thickness tests
3612 Resist
Target: 1.0 Microns, Measured: Ave- 10335A, Std Dev: 34A
Target: 1.6 Microns, Measured: Ave- 16903A, Std Dev: 42A
SPR 955-7 Resist
Target: 0.7 Microns, Measured; Ave- 6861A, Std Dev: 9A
Target: 1.0 Microns, Measured: Ave- 9883A, Std Dev: 20A
Target: 0.9 Microns, Measured: Ave- 8883, Std Dev: 7A
Top EBR: OK, Backside: Clean




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