Problem svgcoat2 SNF 2009-01-09 11:02:06: 220-3 down

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Jan 16 11:29:38 PST 2009


Installed  and programmed backup cybor pump controller.  Rurged acetone out of pump. Purged in 220-3 resist.. Ran dummy and test wafers. all looks good. Thickness test results:
  Target: 3.0 Microns
  Mean (5 points):  30250 A
  Std Dev: 43  A




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