From ywidjaja at snf.stanford.edu  Sat Jul 11 05:56:12 2009
From: ywidjaja at snf.stanford.edu (ywidjaja at snf.stanford.edu)
Date: Sat, 11 Jul 2009 05:56:12 -0700
Subject: Problem svgcoat2 SNF 2009-07-11 05:56:12: no EBR?
Message-ID: <mailman.640.1356283435.4703.svgcoat2-pcs@snf.stanford.edu>

Running 1um 955 2mm EBR recipe, but no EBR.  Resist observed at back side as well.



From lwchang at snf.stanford.edu  Sat Jul 11 16:43:50 2009
From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu)
Date: Sat, 11 Jul 2009 16:43:50 -0700
Subject: Problem svgcoat2 SNF 2009-07-11 16:43:49: NO EBR ( prog7 2mm EBR)
Message-ID: <mailman.641.1356283435.4703.svgcoat2-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Mon Jul 13 08:12:36 2009
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mon, 13 Jul 2009 08:12:36 -0700
Subject: Problem svgcoat2 SNF 2009-07-11 05:56:12: no EBR?
Message-ID: <mailman.642.1356283435.4703.svgcoat2-pcs@snf.stanford.edu>

Found EBR Canister Disconnected, Plugged back on and tested. EBR Working Normal, Ok to use



From vilanova at snf.stanford.edu  Mon Jul 13 08:12:41 2009
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mon, 13 Jul 2009 08:12:41 -0700
Subject: Problem svgcoat2 SNF 2009-07-11 16:43:49: NO EBR ( prog7 2mm EBR)
Message-ID: <mailman.643.1356283435.4703.svgcoat2-pcs@snf.stanford.edu>

Found EBR Canister Disconnected, Plugged back on and tested. EBR Working Normal, Ok to use



From vilanova at snf.stanford.edu  Wed Jul 15 14:11:53 2009
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Wed, 15 Jul 2009 14:11:53 -0700
Subject: Comment svgcoat2 SNF 2009-07-15 14:11:52: cleaned catch cup , dummy wafers and belts On Both tracks 
Message-ID: <mailman.644.1356283435.4703.svgcoat2-pcs@snf.stanford.edu>




From sbasumal at snf.stanford.edu  Sat Jul 18 13:40:32 2009
From: sbasumal at snf.stanford.edu (sbasumal at snf.stanford.edu)
Date: Sat, 18 Jul 2009 13:40:32 -0700
Subject: Shutdown svgcoat2 SNF 2009-07-18 13:40:32: 
Message-ID: <mailman.645.1356283435.4703.svgcoat2-pcs@snf.stanford.edu>




From sbasumal at snf.stanford.edu  Sun Jul 19 02:27:04 2009
From: sbasumal at snf.stanford.edu (sbasumal at snf.stanford.edu)
Date: Sun, 19 Jul 2009 02:27:04 -0700
Subject: Shutdown svgcoat2 SNF 2009-07-19 02:27:03: 
Message-ID: <mailman.646.1356283435.4703.svgcoat2-pcs@snf.stanford.edu>




From gsosa at snf.stanford.edu  Mon Jul 20 08:50:57 2009
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Mon, 20 Jul 2009 08:50:57 -0700
Subject: Shutdown svgcoat2 SNF 2009-07-18 13:40:32: 
Message-ID: <mailman.647.1356283435.4703.svgcoat2-pcs@snf.stanford.edu>

Reset nettrack application. Reset hardware. System tested OK



From gsosa at snf.stanford.edu  Mon Jul 20 08:51:11 2009
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Mon, 20 Jul 2009 08:51:11 -0700
Subject: Shutdown svgcoat2 SNF 2009-07-19 02:27:03: 
Message-ID: <mailman.648.1356283435.4703.svgcoat2-pcs@snf.stanford.edu>

Reset nettrack application. Reset hardware. System tested OK



From yeh at snf.stanford.edu  Tue Jul 21 17:53:34 2009
From: yeh at snf.stanford.edu (yeh at snf.stanford.edu)
Date: Tue, 21 Jul 2009 17:53:34 -0700
Subject: Problem svgcoat2 SNF 2009-07-21 17:53:34: sender track not working
Message-ID: <mailman.649.1356283435.4703.svgcoat2-pcs@snf.stanford.edu>

when using program 7 w/ VP w/2mm ebr.  the conveyor belts for the sender do not move and wafers sit idle.  works with program 7 w/o vp w/2mm ebr.



From vilanova at snf.stanford.edu  Wed Jul 22 08:12:29 2009
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Wed, 22 Jul 2009 08:12:29 -0700
Subject: Problem svgcoat2 SNF 2009-07-21 17:53:34: sender track not working
Message-ID: <mailman.650.1356283435.4703.svgcoat2-pcs@snf.stanford.edu>

cleaned the chuck , Also noticed that when the rail os on the bottom
sometimes gets stuck , we will be monitoring it
for the next 2 days. Ok to use.