Problem svgcoat2 SNF 2009-07-21 17:53:34: sender track not working

yeh at snf.stanford.edu yeh at snf.stanford.edu
Tue Jul 21 17:53:34 PDT 2009


when using program 7 w/ VP w/2mm ebr.  the conveyor belts for the sender do not move and wafers sit idle.  works with program 7 w/o vp w/2mm ebr.




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