From rostam at snf.stanford.edu Sun Mar 8 20:23:53 2009 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Sun, 8 Mar 2009 20:23:53 -0700 Subject: Problem svgcoat2 SNF 2009-03-08 20:23:53: transfer rail on coater doesn't work Message-ID: From vilanova at snf.stanford.edu Mon Mar 9 08:12:48 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 9 Mar 2009 08:12:48 -0700 Subject: Problem svgcoat2 SNF 2009-03-08 20:23:53: transfer rail on coater doesn't work Message-ID: cycled wafers , system working fine , we;ll keep an eye on it. From damodei at snf.stanford.edu Mon Mar 23 18:13:17 2009 From: damodei at snf.stanford.edu (damodei at snf.stanford.edu) Date: Mon, 23 Mar 2009 18:13:17 -0700 Subject: Comment svgcoat2 SNF 2009-03-23 18:13:17: VP station problems Message-ID: Rails on VP station move up and down in a very jerky manner and the station works only intermittently. From gsosa at snf.stanford.edu Tue Mar 24 09:22:55 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 24 Mar 2009 09:22:55 -0700 Subject: Shutdown svgcoat2 SNF 2009-03-24 09:22:55: Broken motor mounts Message-ID: Lifter problems on vapor prime module. The motor mounts for the wafer lifters are broken and need replacement. From gsosa at snf.stanford.edu Tue Mar 24 14:08:15 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 24 Mar 2009 14:08:15 -0700 Subject: Shutdown svgcoat2 SNF 2009-03-24 09:22:55: Broken motor mounts Message-ID: Replaced 2 broken vibration isolating motor mounts. Also replaced the leadscrew for the lifter mechanism. Tested track operation. All OK. From gsosa at snf.stanford.edu Tue Mar 24 14:08:21 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 24 Mar 2009 14:08:21 -0700 Subject: Comment svgcoat2 SNF 2009-03-23 18:13:17: VP station problems Message-ID: Replaced 2 broken vibration isolating motor mounts. Also replaced the leadscrew for the lifter mechanism. Tested track operation. All OK. From ludwig at snf.stanford.edu Wed Mar 25 12:32:08 2009 From: ludwig at snf.stanford.edu (ludwig at snf.stanford.edu) Date: Wed, 25 Mar 2009 12:32:08 -0700 Subject: Problem svgcoat2 SNF 2009-03-25 12:32:07: 3um. resist Message-ID: On Prog. 4, 3um, ran 5 test wafers and 2 SOI, all came out bad From vilanova at snf.stanford.edu Wed Mar 25 14:20:51 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 25 Mar 2009 14:20:51 -0700 Subject: Problem svgcoat2 SNF 2009-03-25 12:32:07: 3um. resist Message-ID: Replaced Resist Bottle and purged Line, Cleaned Dispense hose, Cleaned Catch cup ( I Cleaned Up trac # 1aswell ) Cleaned Dummy wafers, Cycled Wafers, Uniformity( with and without EBR ) Looks Good, Ok to use. From mahnaz at snf.stanford.edu Mon Mar 30 16:17:22 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 30 Mar 2009 16:17:22 -0700 Subject: Problem svgcoat2 SNF 2009-03-30 16:17:21: 3 um spin boat Message-ID: Ran 5 dummies and 5 real wafers all wafers came out bad. All wafers have spin boats, i showed them to Gary and Mario. From vilanova at snf.stanford.edu Tue Mar 31 10:54:10 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 31 Mar 2009 10:54:10 -0700 Subject: Shutdown svgcoat2 SNF 2009-03-31 10:54:10: Under maintenance...... Message-ID: From vilanova at snf.stanford.edu Tue Mar 31 14:02:31 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 31 Mar 2009 14:02:31 -0700 Subject: Shutdown svgcoat2 SNF 2009-03-31 10:54:10: Under maintenance...... Message-ID: cleaned exhaust system and catch cup cycled wafers Uniformity Looks Good , ok to use From vilanova at snf.stanford.edu Tue Mar 31 14:02:38 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 31 Mar 2009 14:02:38 -0700 Subject: Problem svgcoat2 SNF 2009-03-30 16:17:21: 3 um spin boat Message-ID: cleaned exhaust system and catch cup cycled wafers Uniformity Looks Good , ok to use From vilanova at snf.stanford.edu Tue Mar 31 14:02:52 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 31 Mar 2009 14:02:52 -0700 Subject: Comment svgcoat2 SNF 2009-02-04 08:41:13: cleaned catch cup belts, chuck , hotplate. Message-ID: cleared.