Problem svgcoat2 SNF 2009-03-25 12:32:07: 3um. resist

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Mar 25 14:20:51 PDT 2009


Replaced Resist Bottle and purged Line, Cleaned Dispense hose,
Cleaned Catch cup ( I Cleaned Up trac # 1aswell ) Cleaned
Dummy wafers, Cycled Wafers, Uniformity( with and without EBR )
 Looks Good, Ok to use. 




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