Problem svgcoat2 SNF 2009-03-30 16:17:21: 3 um spin boat

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Mon Mar 30 16:17:22 PDT 2009


Ran 5 dummies and 5 real wafers all wafers came out bad.
All wafers have spin boats, i showed them to Gary and Mario.




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