From vilanova at snf.stanford.edu Fri May 1 08:19:30 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 1 May 2009 08:19:30 -0700 Subject: Problem svgcoat2 SNF 2009-04-30 15:00:34: many errors Message-ID: Adjusted In-out Arm Rail, Also Found To wires for the Belts Motor making contact this was making the system turn Off on some ocassion when the wafer Got to the chuck or prior to get to it, Cycled wafers, Ok to use . From vilanova at snf.stanford.edu Fri May 1 08:19:37 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 1 May 2009 08:19:37 -0700 Subject: Problem svgcoat2 SNF 2009-04-30 22:46:58: wafers stuck under vacuum to the chuck Message-ID: Adjusted In-out Arm Rail, Also Found To wires for the Belts Motor making contact this was making the system turn Off on some ocassion when the wafer Got to the chuck or prior to get to it, Cycled wafers, Ok to use . From kimsangb at snf.stanford.edu Fri May 1 21:56:38 2009 From: kimsangb at snf.stanford.edu (kimsangb at snf.stanford.edu) Date: Fri, 1 May 2009 21:56:38 -0700 Subject: Problem svgcoat2 SNF 2009-05-01 21:56:37: vapor/prime malfunction Message-ID: Error message reads, "HPO/VP VAC. BREAK START". It can not run vapor/prime step and I had to skip vapor/prime. From kimsangb at snf.stanford.edu Fri May 1 22:30:58 2009 From: kimsangb at snf.stanford.edu (kimsangb at snf.stanford.edu) Date: Fri, 1 May 2009 22:30:58 -0700 Subject: Comment svgcoat2 SNF 2009-05-01 22:30:57: vapor/prime is working again. Message-ID: I found a broken wafer piece on the vapor/prime chuck. After removing the piece, it is working all right. From gsosa at snf.stanford.edu Mon May 4 13:20:46 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 May 2009 13:20:46 -0700 Subject: Problem svgcoat2 SNF 2009-05-01 21:56:37: vapor/prime malfunction Message-ID: Checked and cleaned HMDS hotplate. Tested operation- All OK/ From mtang at snf.stanford.edu Mon May 4 17:21:19 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 4 May 2009 17:21:19 -0700 Subject: Problem svgcoat2 SNF 2009-05-04 17:21:19: E341 reports bad spin Message-ID: pponce and karthikv ran E341 wafers using program 3. Spin looked terrible -- middle of the wafer was covered but streaky coverage on edges. Anyone else have problems? From vilanova at snf.stanford.edu Tue May 5 08:00:57 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 5 May 2009 08:00:57 -0700 Subject: Comment svgcoat2 SNF 2009-05-01 22:30:57: vapor/prime is working again. Message-ID: Cleared. From mtang at snf.stanford.edu Tue May 5 08:19:05 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 5 May 2009 08:19:05 -0700 Subject: Problem svgcoat2 SNF 2009-05-04 17:21:19: E341 reports bad spin Message-ID: As per Pierre, the test wafers were OK, but the device wafers, with 30 micron trenches, did not coat well, as you might expect for deep trenches... From alsune at snf.stanford.edu Tue May 12 01:42:32 2009 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Tue, 12 May 2009 01:42:32 -0700 Subject: Shutdown svgcoat2 SNF 2009-05-12 01:42:32: Drain Alarm Message-ID: Drain Alarm went off while using track #2. Silence the alarm by toggling the audible alarm switch. From vilanova at snf.stanford.edu Tue May 12 07:41:22 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 12 May 2009 07:41:22 -0700 Subject: Shutdown svgcoat2 SNF 2009-05-12 01:42:32: Drain Alarm Message-ID: The small Carboy was Full I just Empty it and system started to work perfectly Fine, Easy and simple , this should have been good just yellow Lighting it. Cycled wafers, ok to use. From mahnaz at stanford.edu Tue May 12 08:48:00 2009 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Tue, 12 May 2009 08:48:00 -0700 Subject: Shutdown svgcoat2 SNF 2009-05-12 01:42:32: Drain Alarm In-Reply-To: <20090512144123.143A53B6E26@smtp5.stanford.edu> References: <20090512144123.143A53B6E26@smtp5.stanford.edu> Message-ID: <4A099A30.3000806@stanford.edu> All, There are two buttons on the top right of the system, all you have to do press and hold the button that goes to the track is alarming and you will hear that the system will pump the carboy to the big one in the yellow cabinet. THIS DOES NOT CALL FOR YELLOW LIGHT OR SHUTTING THE SYSTEM. please see the staff. mahnaz vilanova at snf.stanford.edu wrote: > The small Carboy was Full I just Empty it and system started to work > perfectly Fine, Easy and simple , this should have been good just > yellow Lighting it. Cycled wafers, ok to use. > > From dongrip at snf.stanford.edu Tue May 19 01:23:17 2009 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Tue, 19 May 2009 01:23:17 -0700 Subject: Problem svgcoat2 SNF 2009-05-19 01:23:17: a piece of sample was shattered during spinning Message-ID: I spin-coated 1 micron thick SPR3612 with a piece of sample taped on 4in wafer. While spinning, the sample was detached from the wafer, and it's shattered inside the spinning bucket. I tried to remove the broken sheds, but I couldn't fully make it. I'm really sorry for your inconvenience. From vilanova at snf.stanford.edu Tue May 19 06:25:10 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 19 May 2009 06:25:10 -0700 Subject: Problem svgcoat2 SNF 2009-05-19 01:23:17: a piece of sample was shattered during spinning Message-ID: Removed Broken Pieces, cleaned catch cup Hotplates and belts, tested and cycled wafers, Ok to use.