Problem svgcoat2 SNF 2009-04-30 22:46:58: wafers stuck under vacuum to the chuck

vilanova at vilanova at
Fri May 1 08:19:37 PDT 2009

Adjusted In-out Arm Rail, Also Found To wires for the Belts Motor
making contact this was making the system turn Off on some ocassion
when the wafer Got to the chuck or prior to get to it,
Cycled wafers, Ok to use . 

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