Comment svgcoat2 SNF 2009-05-01 22:30:57: vapor/prime is working again.

kimsangb at snf.stanford.edu kimsangb at snf.stanford.edu
Fri May 1 22:30:58 PDT 2009


I found a broken wafer piece on the vapor/prime chuck. After removing the piece, it is working all right.




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