Problem svgcoat2 SNF 2009-05-04 17:21:19: E341 reports bad spin

mtang at snf.stanford.edu mtang at snf.stanford.edu
Mon May 4 17:21:19 PDT 2009


pponce and karthikv ran E341 wafers using program 3.  Spin looked terrible -- middle of the wafer was covered but streaky coverage on edges.  Anyone else have problems?




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