Problem svgcoat2 SNF 2009-05-04 17:21:19: E341 reports bad spin

mtang at snf.stanford.edu mtang at snf.stanford.edu
Mon May 4 17:21:19 PDT 2009

Previous message: Comment svgcoat2 SNF 2009-05-01 22:30:57: vapor/prime is working again.
Next message: Problem svgcoat2 SNF 2009-05-04 17:21:19: E341 reports bad spin
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

pponce and karthikv ran E341 wafers using program 3.  Spin looked terrible -- middle of the wafer was covered but streaky coverage on edges.  Anyone else have problems?

Previous message: Comment svgcoat2 SNF 2009-05-01 22:30:57: vapor/prime is working again.
Next message: Problem svgcoat2 SNF 2009-05-04 17:21:19: E341 reports bad spin
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the svgcoat2-pcs mailing list