Problem svgcoat2 SNF 2009-05-04 17:21:19: E341 reports bad spin

mtang at snf.stanford.edu mtang at snf.stanford.edu
Tue May 5 08:19:05 PDT 2009


As per Pierre, the test wafers were OK, but the device wafers, with 30 micron trenches, did not coat well, as you might expect for deep trenches...




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