Problem svgcoat2 SNF 2009-05-19 01:23:17: a piece of sample was shattered during spinning

dongrip at snf.stanford.edu dongrip at snf.stanford.edu
Tue May 19 01:23:17 PDT 2009


I spin-coated 1 micron thick SPR3612 with a piece of sample taped on 4in wafer. While spinning, the sample was detached from the wafer, and it's shattered inside the spinning bucket. I tried to remove the broken sheds, but I couldn't fully make it. I'm really sorry for your inconvenience.




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