Problem svgcoat2 SNF 2009-05-19 01:23:17: a piece of sample was shattered during spinning

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue May 19 06:25:10 PDT 2009


Removed Broken Pieces, cleaned catch cup Hotplates and belts, 
tested and cycled wafers, Ok to use. 




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