From gsosa at snf.stanford.edu Mon Nov 2 10:01:24 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 2 Nov 2009 10:01:24 -0800 Subject: Comment svgcoat2 SNF 2009-11-02 10:01:23: SPR 955-7 Thickness test 11/02 Message-ID: Checked the 0.7 micron resist program for SPR 955-.7 photoresist. Target thickness = 0.7 microns. Mean thickness(5 points): 6898 Angstroms, Std Dev. 16 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean. From lilihsu at snf.stanford.edu Tue Nov 3 11:36:00 2009 From: lilihsu at snf.stanford.edu (lilihsu at snf.stanford.edu) Date: Tue, 3 Nov 2009 11:36:00 -0800 Subject: Problem svgcoat2 SNF 2009-11-03 11:35:59: 7um resist coat Message-ID: I ran 5 dummies and still a bubble in the resist dropped onto the wafer, causing large streaks. From vilanova at snf.stanford.edu Tue Nov 3 13:46:19 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 3 Nov 2009 13:46:19 -0800 Subject: Problem svgcoat2 SNF 2009-11-03 11:35:59: 7um resist coat Message-ID: 7Um Is On Track # 1 From rhenn at snf.stanford.edu Sun Nov 8 14:42:25 2009 From: rhenn at snf.stanford.edu (rhenn at snf.stanford.edu) Date: Sun, 8 Nov 2009 14:42:25 -0800 Subject: Comment svgcoat2 SNF 2009-11-08 14:42:24: Alarm Message-ID: Previous user disabled alarm and ran 3612 withouth replacing bottle. Huge air bubble in the line. Currently running dummies to remove bubbles. From vilanova at snf.stanford.edu Mon Nov 9 13:52:11 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 9 Nov 2009 13:52:11 -0800 Subject: Comment svgcoat2 SNF 2009-11-08 14:42:24: Alarm Message-ID: CHecked system , Cycled wafers , System Ok , Cleared and ready to use. From fnf1pal at snf.stanford.edu Fri Nov 13 11:16:53 2009 From: fnf1pal at snf.stanford.edu (fnf1pal at snf.stanford.edu) Date: Fri, 13 Nov 2009 11:16:53 -0800 Subject: Shutdown svgcoat2 SNF 2009-11-13 11:16:53: Wafer stuck on bake chuck Message-ID: From vilanova at snf.stanford.edu Fri Nov 13 11:38:03 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 13 Nov 2009 11:38:03 -0800 Subject: Shutdown svgcoat2 SNF 2009-11-13 11:16:53: Wafer stuck on bake chuck Message-ID: removed wafer cleaned hotplate and tested, Ok ready to use. From pponce at snf.stanford.edu Thu Nov 19 13:57:14 2009 From: pponce at snf.stanford.edu (pponce at snf.stanford.edu) Date: Thu, 19 Nov 2009 13:57:14 -0800 Subject: Problem svgcoat2 SNF 2009-11-19 13:57:14: send station not moving Message-ID: Wafers aren't being pushed from the sender station. Cassette moves up and down, but the belts are stuck. From gsosa at snf.stanford.edu Thu Nov 19 14:43:47 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 19 Nov 2009 14:43:47 -0800 Subject: Problem svgcoat2 SNF 2009-11-19 13:57:14: send station not moving Message-ID: Reset lifter assembly on vapor prime module. Tested track operation. From faridz at snf.stanford.edu Tue Nov 24 17:01:09 2009 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Tue, 24 Nov 2009 17:01:09 -0800 Subject: Problem svgcoat2 SNF 2009-11-24 17:01:09: HMDS Contamination Message-ID: Please check HMDS wafers looks contaminated (lots of Sprinkles spots) on the wafers. From vilanova at snf.stanford.edu Wed Nov 25 07:40:42 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 25 Nov 2009 07:40:42 -0800 Subject: Problem svgcoat2 SNF 2009-11-24 17:01:09: HMDS Contamination Message-ID: removed broken wafer pieces and cleaned Resist Residues >From Hotplate, Ready To use. From rik at snf.stanford.edu Fri Nov 27 22:04:57 2009 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Fri, 27 Nov 2009 22:04:57 -0800 Subject: Problem svgcoat2 SNF 2009-11-27 22:04:56: VP holder got stuck Message-ID: The VP holder got stuck on the bottom. Once it was pried up the track started to function again. May be an intermittent problem. From vilanova at snf.stanford.edu Mon Nov 30 08:11:12 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 30 Nov 2009 08:11:12 -0800 Subject: Comment svgcoat2 SNF 2009-11-30 08:11:12: HMDS Hotplate station Back On Message-ID: I got The HMDS Working again But it i svery Inconsistence So we are going to keep an eye on it.